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Displaying 1-1 of 1 results for author "Wagner, Alfred."
Electron-beam, x-ray, and ion-beam techniques for submicrometer lithographies III : March 15-16, 1984, Santa Clara, California / Alfred Wagner, chairman-editor ; cooperating organization, the International Society for Hybrid Microelectronics.
- Text
- Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1984.
- 1984
- 1 Item
Item details Format Call Number Item Location Text TR940 .E432 Off-site
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