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Displaying 1-3 of 3 results for author "Wittekoek, Steve."
Optical microlithography and metrology for microcircuit fabrication : 27-28 April 1989, Paris, France / Michel J. Lacombat, Steve Wittekoek, chairs/editors ; the Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering ; cooperating organizations, ANRT Association nationale de la recherche technique [and others].
- Text
- Bellingham, Wash., USA : SPIE, [1989], ©1989.
- 1989-1989
- 1 Item
Item details Format Call Number Item Location Text TR940 .O698 1989g Off-site Optical microlithography and metrology for microcircuit fabrication : ECO2, 27-28 April 1989, Paris, France / Michel J. Lacombat, Steve Wittekoek, chairs/editors ; the Congress of EPS--European Physical Society, Europtica--the European Federation for Applied Optics, SPIE--the International Society for Optical Engineering ; cooperating organizations, ANRT Association nationale de la recherche technique ... [et al.].
- Text
- Bellingham, Wash., USA : SPIE, c1989.
- 1989
- 1 Item
Item details Format Call Number Item Location Text TK7874 .E26 1989 Off-site Optical microlithography and metrology for microcircuit fabrication : proceedings, ECO2, 27-28 April, 1989, Paris, France / Michel J. Lacombat, Steve Wittekoek, chairs/editors.
- Text
- Bellingham, Wash., USA : SPIE, ©1989.
- 1989
- 1 Item
Item details Format Call Number Item Location Text TK7874 .E26 1989 Off-site
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