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Displaying 1-3 of 3 results for author "Wittekoek, Steven."
Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, the Hague, the Netherlands / Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique, SPIE--the International Society for Optical Engineering ; cooperating sponsors, Comité Belge d'Optique [and others].
- Text
- Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1987], ©1987.
- 1987-1987
- 1 Item
Item details Format Call Number Item Location Text TK8784 .O7 1987g Off-site Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands / Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique ... [et al.].
- Text
- 1987
- 1 Item
Item details Format Call Number Item Location Text TK7874 .O66 1987 Off-site Optical microlithographic technology for integrated circuit fabrication and inspection : 2-3 April 1987, The Hague, The Netherlands / Harry L. Stover, Steven Wittekoek, chairs/editors ; organized by ANRT--Association nationale de la recherche technique ... [et al.].
- Text
- Bellingham, Wash., USA : SPIE-the International Society for Optical Engineering, c1987.
- 1987
- 1 Item
Item details Format Call Number Item Location Text TK7874 .O66 1987 Off-site
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