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Displaying 1-1 of 1 results for author "Symposium on Plasma Etching and Deposition (1980 : Hollywood, Fla.)"
Plasma processing : proceedings of the Symposium on Plasma Etching and Deposition / edited by R.G. Frieser, C.J. Mogab ; [sponsored by] Dielectrics and Insulation and Electronics Divisions.
- Text
- Pennington, NJ (10 South Main St., Pennington 08534) : Electrochemical Society, c1981.
- 1981
- 1 Item
Item details Format Call Number Item Location Text TK7871.85.S973 1980 Off-site
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