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Displaying 1-8 of 8 results for author "Behringer, Uwe F. W."
15th European Conference on Mask Technology for Integrated Circuits and Microcomponents '98 : 16-17 November 1998, Munich-Unterhaching, Germany / Uwe Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany) ; cooperating organizations, SEMI-Europe--Semiconductor Equipment and Materials International, BACUS (USA), [and] SPIE--the International Society for Optical Engineering.
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- Bellingham, Wash., USA : SPIE, [1999], ©1999.
- 1999-1999
- 1 Item
Item details Format Call Number Item Location Text TK7872.M3 E89 1998g Off-site 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) ; cooperating organization, Institute for Microstructure Technology/Forschungszentrum Karlsruhe GmbH (Germany).
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- Bellingham, Wash., USA : SPIE, [2000], ©2000.
- 2000-2000
- 1 Item
Item details Format Call Number Item Location Text TK7872.M3 E89 1999g Off-site 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 13-14 November, 2000, Munich, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society and Institute for Microstructure Technology (GMM) (Germany) ; published by, SPIE--The International Society for Optical Engineering.
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- Bellingham, Washington : SPIE, [2001], ©2001.
- 2001-2001
- 1 Item
Item details Format Call Number Item Location Text TK7872.M3 E89 2000g Off-site MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK / Uwe F.W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK).
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- Bellingham, Wash., USA : SPIE, [2001], ©2001.
- 2001-2001
- 1 Item
Item details Format Call Number Item Location Text TK7875 .M39 2001g Off-site 18th European Conference on Mask Technology for Integrated Circuits and Microcomponents : proceedings : 15-16 January, 2002, Munich, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) [and others] ; [published by, SPIE--The International Society for Optical Engineering].
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- Bellingham, Washington : SPIE, [2002], ©2002.
- 2002-2002
- 1 Item
Item details Format Call Number Item Location Text TK7872.M3 E89 2002g Off-site MEMS/MOEMS : advances in photonic communications, sensing, metrology, packaging and assembly : 28-29 October 2002, Brugge, Belgium / Uwe F. W. Behringer ... [et al.], chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperating organizations, EOS--European Optical Society ... [et al.].
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- 2003
- 1 Item
Item details Format Call Number Item Location Text TK7875 .M47 2003g Off-site 19th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 13-15 January, 2003, Sonthofen, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI--Society Microelectronics, Micro- and Precision Engineering (GMM) ... [et al.] ; cooperating oganizations, SEMI Europe ... [et al.] ; published by SPIE--The International Society for Optical Engineering.
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- 2003
- 1 Item
Item details Format Call Number Item Location Text TK7872.M3 E97 2003g Off-site 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 12-14 January 2004, Dresden, Germany / Uwe F.W. Behringer, chair/editor ; organized by VDE/VDI-Society Microelectronics, Micro- and Precision Engineering (GMM) (Germany) [and] Institute for Microstructure Technology/Forschungszentrum Karlsruhe (Germany) ; cooperating organizations, SEMI Europe ... [et al.].
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- 2004
- 1 Item
Item details Format Call Number Item Location Text TK7872.M3 E97 2004g Off-site
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