Research Catalog

  • Characterization of plasma-enhanced CVD processes : symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess.

    • Text
    • Pittsburgh, Pa. : Materials Research Society, c1990.
    • 1990
    • 1 Item
    FormatCall NumberItem Location
    Text JSE 92-1919Offsite
  • Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess.

    • Text
    • Pittsburgh, Pa. : Materials Research Society, [1990], ©1990.
    • 1990-1990
    • 1 Item
    FormatCall NumberItem Location
    Text TS695.15 .C47 1990Off-site

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