Research Catalog

  • Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA / Alfred K.K. Wong, Kevin M. Monahan, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash. : SPIE, c2003.
    • 2003
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .C67 2003gOff-site
  • Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California / Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester.

    • Text
    • Bellingham, Wash., USA : SPIE--International Society for Optical Engineering, 1985.
    • 1985
    • 1 Item
    FormatCall NumberItem Location
    Book/Text TK7874 .M488 1985Off-site
  • Integrated circuit metrology, inspection, and process control : 4-6, March 1987, Santa Clara, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1987], ©1987.
    • 1987-1987
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .I5426 1987gOff-site
  • Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash., USA : SPIE, [1988], ©1988.
    • 1988-1988
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .I54682 1988Off-site
  • Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, [1989], ©1989.
    • 1989-1989
    • 1 Item
    FormatCall NumberItem Location
    Text TK787 .I54683 1989gOff-site
  • Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California / Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester.

    • Text
    • Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1985.
    • 1985
    • 1 Item
    FormatCall NumberItem Location
    Book/Text TK7874 .M52Off-site
  • Integrated circuit metrology, inspection, and process control : [papers] / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering, 4-6 March 1987, Santa Clara, California.

    • Text
    • Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1987.
    • 1987
    • 1 Item
    FormatCall NumberItem Location
    Book/Text TK7874 .I5468 1987Off-site
  • Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1988.
    • 1988
    • 1 Item
    FormatCall NumberItem Location
    Book/Text TK7874 .I54682Off-site
  • Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1989.
    • 1989
    • 1 Item
    FormatCall NumberItem Location
    Book/Text TK7874.I54683Off-site
  • Integrated circuit metrology, inspection, and process control II : 29 February-1 March 1988, Santa Clara, California / Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1988.
    • 1988
    • 1 Item
    FormatCall NumberItem Location
    Book/Text TK7874 .I54682Off-site

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