Research Catalog

  • Developments in semiconductor microlithography II : [seminar], April 4-5, 1977, San Jose, California / James W. Giffin, Bruce Ruff, editors ; presented by the Society of Photo-optical Instrumentation Engineers and the Northern California Microphotomask/Masking Working Group, in cooperation with the International Society for Hybrid Microelectronics.

    • Text
    • Bellingham, Wash. : SPIE, c1977.
    • 1977
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85.D493Off-site
  • Developments in semiconductor microlithography IV : April 23-24, 1979, San Jose, California / Jim Dey, editor ; cooperating organization, Northern California Microphotomask/Masking Working Group.

    • Text
    • Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, c1979.
    • 1979
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .D495Off-site
  • Semiconductor microlithography V / Jim Dey, editor ; presented by the Society of Photo-optical Instrumentation Engineers in cooperation with the Northern California Microphotomask/Masking Working Group and the International Society for Hybrid Microelectronics, March 17-18, 1980, San Jose, California.

    • Text
    • Bellingham, Wash. : SPIE, 1980.
    • 1980
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .S465Off-site
  • Optical microlithography : technology for the mid-1980s : March 31-April 1, 1982, Santa Clara, California / Harry L. Stover, chairman-editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1982.
    • 1982
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .O67Off-site
  • Submicron lithography : March 29-30, 1982, Santa Clara, California / Phillip D. Blais, chairman-editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1982.
    • 1982
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .S82Off-site

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