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Displaying 1-2 of 2 results for author "Progler, Christopher J."
Optical microlithography XIII : 1-3 March, 2000, Santa Clara, [California], USA / Christopher J. Progler, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
- Text
- Bellingham, Washington : SPIE, [2000], ©2000.
- 2000-2000
- 2 Items
Item details Format Call Number Item Location Text TK7835 .O65 2000g p.2 Off-site Item details Format Call Number Item Location Text TK7835 .O65 2000g p.1 Off-site Optical microlithography XIV : 27 February-2 March, 2001, Santa Clara, [California], USA / Christopher J. Progler, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
- Text
- Bellingham, Wash. : SPIE, [2001], ©2001.
- 2001-2001
- 2 Items
Item details Format Call Number Item Location Text TR940 .O695 2001 v.2 Off-site Item details Format Call Number Item Location Text TR940 .O695 2001 v.1 Off-site
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