Research Catalog

  • Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October 1995, Austin, Texas / Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.

    • Text
    • Bellingham, Wash., USA : SPIE, [1995], ©1995.
    • 1995-1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .P76 1995gOff-site
  • Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October, 1995, Austin, Texas / Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

    • Text
    • Bellingham, Wash., USA : SPIE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .P763 1995Off-site
  • Process, equipment, and materials control in integrated circuit manufacturing : 25-26 October, 1995, Austin, Texas / Anant G. Sabnis, Ivo J. Raaijmakers, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International.

    • Text
    • Bellingham, Wash., USA : SPIE, c1995.
    • 1995
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .P763 1995Off-site

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