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Displaying 1-2 of 2 results for author "Symposium on Plasma Synthesis and Etching of Electronic Materials (1984 : Boston, Mass.)"
Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles.
- Text
- Pittsburgh, Pa. : Materials Research Society, c1985.
- 1985
- 1 Item
Item details Format Call Number Item Location Book/Text JSE 86-552 Offsite Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors, R.P.H. Chang, B. Abeles.
- Text
- Pittsburgh, Pa. : Materials Research Society, [1985], ©1985.
- 1985-1985
- 1 Item
Item details Format Call Number Item Location Text TA2005 .P54 1985 Off-site
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