Research Catalog

  • Optical microlithography XI : 25-27 February, 1998, Santa Clara, California / Luc Van den hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations SEMI--Semiconductor Equipment and Materials International, SEMATECH.

    • Text
    • Bellingham, Washington : SPIE, [1998], ©1998.
    • 1998-1998
    • 1 Item
    FormatCall NumberItem Location
    Text TK7872.M3 O68 1998Off-site
  • Optical microlithography XII : 17-19 March, 1999, Santa Clara, California / Luc Van den Hove, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization SEMI--Semiconductor Equipment and Materials International, SEMATECH.

    • Text
    • Bellingham, Washington : SPIE, [1999], ©1999.
    • 1999-1999
    • 2 Items
    FormatCall NumberItem Location
    Text TK7835 .O65 1999g v.2Off-site
    FormatCall NumberItem Location
    Text TK7835 .O65 1999g v.1Off-site

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