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Displaying 1-3 of 3 results for author "Vladimirsky, Yuli."
Emerging lithographic technologies II : 23-25 February 1998, Santa Clara, California / Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, SEMATECH.
- Text
- Bellingham, Wash. : SPIE, [1998], ©1998.
- 1998-1998
- 1 Item
Item details Format Call Number Item Location Text TK7874 .E523 1998g Off-site Materials and device characterization in micromachining : 21-22 September, 1998, Santa Clara, California / Craig R. Friedrich, Yuli Valdimirsky, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cooperaing organizations , SEMI--Semiconductor Equipment and Materials International [and others].
- Text
- Bellingham, Wash. : SPIE, [1998], ©1998.
- 1998-1998
- 1 Item
Item details Format Call Number Item Location Text TJ1191.5 .M38 1998 Off-site Emerging lithographic technologies III : 15-17 March, 1999, Santa Clara, California / Yuli Vladimirsky, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
- Text
- Bellingham, Washington : SPIE, [1999], ©1999.
- 1999-1999
- 2 Items
Item details Format Call Number Item Location Text TK7874 .E523 1999g p.2 Off-site Item details Format Call Number Item Location Text TK7874 .E523 1999g p.1 Off-site
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