Research Catalog

  • Micromachining and microfabrication process technology VII : 22-24 October, 2001, San Francisco, [California] USA / Jean Michel Karam, John Yasaitis, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, Semiconductor Equipment and Materials International (USA) [and others].

    • Text
    • Bellingham, Washington : SPIE, [2001], ©2001.
    • 2001-2001
    • 1 Item
    FormatCall NumberItem Location
    Text QC176.8.M5 M4 2001gOff-site
  • Micromachining and microfabrication process technology VIII : 27-29 January, 2003, San Jose, California, USA / John A. Yasaitis, Mary Ann Perez-Maher, Jean Michel Karam, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International ... [et al.].

    • Text
    • 2003
    • 1 Item
    FormatCall NumberItem Location
    Text QC176.8.M5 M4 2003gOff-site

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