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Displaying 1-2 of 2 results for author "Yen, Anthony."
Optical microlithography XV : 5-8 March, 2002, Santa Clara, [California], USA / Anthon Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
- Text
- Bellingham, Washington SPIE, [2002], ©2002.
- 2002-2002
- 2 Items
Item details Format Call Number Item Location Text TK7835 .O65 2002g v.2 Off-site Item details Format Call Number Item Location Text TK7835 .O65 2002g v.1 Off-site Optical microlithography XVI : 25-28 February 2003, Santa Clara, California, USA / Anthony Yen, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and Materials International, International SEMATECH.
- Text
- 2003
- 3 Items
Item details Format Call Number Item Location Text TK7835 .O65 2003g pt.3 Off-site Item details Format Call Number Item Location Text TK7835 .O65 2003g pt.2 Off-site Item details Format Call Number Item Location Text TK7835 .O65 2003g pt.1 Off-site
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