Research Catalog

  • Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers [microform] / D.J. Larkin.

    • Text
    • [Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1995]
    • 1995
  • Dopant incorporation efficiency in CVD silicon carbide epilayers [microform] / D.J. Larkin.

    • Text
    • [Washington, DC : National Aeronautics and Space Administration ; Springfield, Va. : National Technical Information Service, distributor, 1996]
    • 1996

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