Research Catalog

  • Advanced techniques for integrated circuit processing II : 21-23 September 1992, San Jose, California / James Bondur [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash., USA : SPIE, [1993], ©1993.
    • 1993-1993
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .A3377 1992gOff-site
  • Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California / James A. Bondur [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash., USA : SPIE, [1994], ©1994.
    • 1994-1994
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .M468 1994gOff-site
  • Dry processing for submicrometer lithography : 12-13 October 1989, Santa Clara, California / James Bondur, Alan R. Reinberg, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMATECH, Center for Advanced Electronics Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison.

    • Text
    • Bellingham, Wash., USA : SPIE, [1990], ©1990.
    • 1990-1990
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85 .D792 1990gOff-site
  • Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California / James Bondur, Terry R. Turner, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash., USA : SPIE, the International Society for Optical Enginering, [1991], ©1991.
    • 1991-1991
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .A34 1991gOff-site
  • Dry processing for submicrometer lithography : 12-13 October 1989, Santa Clara, California / James Bondur, Alan R. Reinberg, chairs/editors ; sponsored by SPIE--The International Society for Optical Engineering ; cooperating organizations, SEMATECH, Center for Advanced Electronics Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison.

    • Text
    • 1990
    • 1 Item
    FormatCall NumberItem Location
    Text TK7871.85.D79Off-site
  • Advanced techniques for integrated circuit processing II : 21-23 September 1992, San Jose, California / James Bondur ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash., USA : SPIE, the International Society for Optical Engineering, c1993.
    • 1993
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .A3376 1993Off-site
  • Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California / James A. Bondur ... [et al.], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

    • Text
    • 1994
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .M547 1994Off-site
  • Advanced techniques for integrated circuit processing II : 21-23 September 1992, San Jose, California / James Bondur [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.

    • Text
    • Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1993.
    • 1993
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .A3376 1993Off-site

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