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Displaying 1-3 of 3 results for author "Nakamura, Moritaka."
1996 1st International Symposium on Plasma Process-Induced Damage : 13-14 May 1996, Santa Clara, California, USA / Kim P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics.
- Text
- Sunnyvale, CA : Northern California Chapter of the American Vacuum Society, [1996], ©1996.
- 1996-1996
- 1 Item
Item details Format Call Number Item Location Text TK7871.85 .I5834 1996 Off-site 1997 2nd International Symposium on Plasma Process-Induced Damage : 13-14 May 1997, Monterey, California, USA / Kin P. Cheung, Moritaka Nakamura, and Calvin T. Gabriel, editors ; technical co-sponsors, IEEE/Electron Devices Society, American Vacuum Society, Japanese Society of Applied Physics.
- Text
- Sunnyvale, CA : Northern California Chapter of the American Vacuum Society, [1997], ©1997.
- 1997-1997
- 1 Item
Item details Format Call Number Item Location Text TK7871.85 .I5834 1997g Off-site 1998 3rd International Symposium on Plasma Process-Induced Damage : June 4-5, 1998, Honolulu, Hawaii, USA / Moritaka Nakamura, Thuy Dao, and Terence Hook, editors ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japanese Society of Applied Physics.
- Text
- Sunnyvale, California : Northern California Chapter of the American Vacuum Society, [1998], ©1998.
- 1998-1998
- 1 Item
Item details Format Call Number Item Location Text TK7871.85 .I5834 1998g Off-site
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