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Displaying 1-5 of 5 results for author "Rossnagel, Stephen M."
Sputtering, phenomena in ion thrusters [microform] : final report / Raymond S. Robinson and Stephen M. Rossnagel.
- Text
- Cleveland, OH : Lewis Research Center, National Aeronautics and Space Administration, [1983]
- 1983
Handbook of ion beam processing technology : principles, deposition, film modification, and synthesis / edited by Jerome J. Cuomo and Stephen M. Rossnagel, Harold R. Kaufman.
- Text
- Park Ridge, N.J., U.S.A. : Noyes Publications, [1989], ©1989.
- 1989-1989
- 1 Item
Item details Format Call Number Item Location Text QC702.7.I55 H36 1989 Off-site Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions / edited by Stephen M. Rossnagel, Jerome J. Cuomo, William D. Westwood.
- Text
- Park Ridge, N.J., U.S.A. : Noyes Publications, [1990], ©1990.
- 1990-1990
- 1 Item
Item details Format Call Number Item Location Text TA2020 .H37 1989 Off-site Modeling of film deposition for microelectronic applications / edited by Stephen Rossnagel.
- Text
- San Diego : Academic Press, c1996.
- 1996
- 1 Item
Item details Format Call Number Item Location Text QC183 5 vol. 22 Off-site PVD for microelectronics : sputter deposition applied to semiconductor manufacturing / Ronald A. Powell, Stephen M. Rossnagel.
- Text
- San Diego, Calif. : Academic Press, c1999.
- 1999
- 1 Item
Item details Format Call Number Item Location Text QC183 5 vol. 26 Off-site
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