Research Catalog

  • Submicron lithography / Phillip D. Blais, chairman/editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society, March 29-30, 1982, Santa Clara, California.

    • Text
    • Bellingham, Wash. : International Society for Optical Engineering, 1982.
    • 1982
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .S85 1982Off-site
  • Electron-beam, x-ray, & ion-beam techniques for submicrometer lithographies V : 11-12 March 1986, Santa Clara, California / Phillip D. Blais, chairman/editor.

    • Text
    • Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1986.
    • 1986
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .E43Off-site
  • Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 1987.
    • 1987
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .E4775 1987gOff-site
  • Electron-beam, x-ray, and ion-beam techniques for submicron lithographies II : March 14-15, 1983, Santa Clara, California / Phillip D. Blais, chairman/editor ; sponsored by SPIE--The International Society for Optical Engineering in cooperation with National Bureau of Standards, International Society for Hybrid Microelectronics, Northern California Microphotomask/Masking Working Group.

    • Text
    • Bellingham, Wash. : SPIE--The International Society for Optical Engineering, c1983.
    • 1983
    • 1 Item
    FormatCall NumberItem Location
    Text TR940 .E43Off-site
  • Electron-beam, x-ray, & ion-beam techniques for submicrometer lithographies V : 11-12 March 1986, Santa Clara, California / Phillip D. Blais, chairman/editor.

    • Text
    • Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1986.
    • 1986
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .E434Off-site
  • Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor.

    • Text
    • 1987
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874.E435Off-site
  • Submicron lithography : March 29-30, 1982, Santa Clara, California / Phillip D. Blais, chairman-editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society.

    • Text
    • 1982
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .S82Off-site
  • Electron-beam, x-ray, & ion-beam techniques for submicrometer lithographies V : 11-12 March 1986, Santa Clara, California / Phillip D. Blais, chairman/editor.

    • Text
    • Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, c1986.
    • 1986
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .E434Off-site
  • Electron-beam, X-ray, and ion-beam lithographies VI : 5-6 March 1987, Santa Clara, California / Phillip D. Blais, chair/editor.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, 1987.
    • 1987
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .E435Off-site
  • Submicron lithography : March 29-30, 1982, Santa Clara, California / Phillip D. Blais, chairman-editor ; in cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society.

    • Text
    • Bellingham, Wash. : SPIE--the International Society for Optical Engineering, c1982.
    • 1982
    • 1 Item
    FormatCall NumberItem Location
    Text TK7874 .S82Off-site

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