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Displaying 1-27 of 27 results
Film deposition by plasma techniques / Mitsuharu Konuma.
- Text
- Berlin ; New York : Springer-Verlag, c1992.
- 1992
- 1 Item
Item details Format Call Number Item Location Text JSE 92-1216 Offsite Characterization of plasma-enhanced CVD processes : symposium held November 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess.
- Text
- Pittsburgh, Pa. : Materials Research Society, c1990.
- 1990
- 1 Item
Item details Format Call Number Item Location Text JSE 92-1919 Offsite Photons and low energy particles in surface processing : symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. / editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang.
- Text
- Pittsburgh, Pa. : Materials Research Society, c1992.
- 1992
- 1 Item
Item details Format Call Number Item Location Text JSE 93-745 Offsite Synthetic diamond : emerging CVD science and technology / edited by Karl E. Spear, John P. Dismukes ; sponsored by the Electrochemical Society, Inc.
- Text
- New York : Wiley, c1994.
- 1994
- 1 Item
Item details Format Call Number Item Location Text JSE 95-1420 Offsite Not available - In use until 2024-01-27 - Please for assistance.Materials and processes for surface and interface engineering / edited by Yves Pauleau.
- Text
- Dordrecht ; Boston : Kluwer Academic Publishers, 1995.
- 1995
- 1 Item
Item details Format Call Number Item Location Text JSE 95-1173 Offsite Plasma processing of polymers : proceedings of the NATO Advanced Study Institute on Plasma Treatments and Deposition of Polymers, Acquafredda di Maratea, Italy, May 19-June 2, 1996 / edited by Riccardo d'Agostino, Pietro Favia, Francesco Fracassi.
- Text
- Boston : Kluwer Academic Publishers, 1998.
- 1998
- 1 Item
Item details Format Call Number Item Location Text JSE 97-1736 Offsite Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A. / editors, Wei William Lee, Riccardo d'Agostino, Michael R. Wertheimer.
- Text
- Warrendale, Pa. : Materials Research Society, c1999.
- 1999
- 1 Item
Item details Format Call Number Item Location Text JSE 00-1602 Offsite An overview of CVD processes [microform] / S. Okamoto.
- Text
- Washington DC : National Aeronautics and Space Administration, [1986]
- 1986
Numerical modeling tools for chemical vapor deposition [microform] / Thomas J. Jasinski and Edward P. Childs.
- Text
- [Washington, D.C.] : National Aeronautics and Space Administration, Office of Management, Scientific and Technical Information Program ; [Springfield, Va. : National Technical Information Service, distributor], 1992.
- 1992
Real time optics of the growth of textured silicon films in photovoltaics : final technical report, 1 August 1999-12 August 2002 / R.W. Collins and C.R. Wronski.
- Text
- Golden, Colo. : National Renewable Energy Laboratory, [2003]
- 2003
- 1 Resource
Available Online
https://purl.fdlp.gov/GPO/LPS48807Plasma techniques for film deposition / Mitsuharu Konuma.
- Text
- Harrow, U.K. : Alpha Science International, c2005.
- 2005
- 1 Item
Item details Format Call Number Item Location Text JSE 06-939 Offsite Plasmas and polymers [electronic resource].
- Text
- [New York, N.Y.] : Kluwer Academic-Plenum-Human Sciences Press, -©2004.
- 1996-2004
- 2 Resources
Available Online
See All Available Online Resources
Film deposition by plasma techniques / Mitsuharu Konuma.
- Text
- Berlin ; New York : Springer-Verlag, 1992.
- 1992
- 1 Item
Item details Format Call Number Item Location Text TK7871.15.F5 K58 1992 Off-site Photons and low energy particles in surface processing : symposium held December 3-6, 1991, Boston, Massachusetts, U.S.A. / editors, Carol I.H. Ashby, James H. Brannon, Stella W. Pang.
- Text
- Pittsburgh, Pa. : Materials Research Society, [1992], ©1992.
- 1992-1992
- 1 Item
Item details Format Call Number Item Location Text TA418.7 .P46 1992 Off-site Hydrogenated amorphous silicon alloy deposition processes / Werner Luft and Y. Simon Tsuo.
- Text
- New York : Marcel Dekker, [1993], ©1993.
- 1993-1993
- 1 Item
Item details Format Call Number Item Location Text TK7872.T55 L84 1993 Off-site Synthetic diamond : emerging CVD science and technology / edited by Karl E. Spear, John P. Dismukes ; sponsored by the Electrochemical Society, Inc.
- Text
- New York : Wiley, [1994], ©1994.
- 1994-1994
- 1 Item
Item details Format Call Number Item Location Text TP873.5.D5 S96 1994 Off-site Plasma deposition of amorphous silicon-based materials / edited by Giovanni Bruno, Pio Capezzuto, Arun Madan.
- Text
- San Diego, CA : Academic Press, 1995.
- 1995
- 1 Item
Item details Format Call Number Item Location Text TK7871.99.A45 P55 1995 Off-site Materials and processes for surface and interface engineering / edited by Yves Pauleau.
- Text
- Dordrecht ; Boston : Kluwer Academic Publishers, 1995.
- 1995
- 1 Item
Item details Format Call Number Item Location Text TS695 .M37 1995 Off-site Plasma processing of polymers : proceedings of the NATO Advanced Study Institute on Plasma Treatments and Deposition of Polymers, Acquafredda di Maratea, Italy, May 19-June 2, 1996 / edited by Riccardo d'Agostino, Pietro Favia, Francesco Fracassi.
- Text
- Dortrecht ; Boston : Kluwer Academic Publishers, [1997], ©1997.
- 1997-1997
- 1 Item
Item details Format Call Number Item Location Text TP1092 .N38 1997 Off-site Plasma deposition and treatment of polymers : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A. / editors, Wei William Lee, Riccardo d'Agostino, Michael R. Wertheimer.
- Text
- Warrendale, Pa. : Materials Research Society, [1999], ©1999.
- 1999-1999
- 1 Item
Item details Format Call Number Item Location Text TA455.P58 P57 1999 Off-site Dusty plasmas : physics, chemistry, and technological impacts in plasma processing / edited by André Bouchoule.
- Text
- Chichester, England ; New York : Wiley, [1999], ©1999.
- 1999-1999
- 1 Item
Item details Format Call Number Item Location Text TA2020 .D88 1999 Off-site Lasers in synthesis, characterization, and processing of diamond : 6-9 October 1997, Tashkent, Uzbekistan / Alexander M. Prokhorov, chair ; Vitaly I. Konov, Mukhsin Kh. Ashurov, cochairs ; Vitaly I. Konov, Victor G. Ralchenko, editors ; sponsored by General Physics Institute, Russian Academy of Sciences (Russia) [and others] ; organized by General Physics Institute, Russian Academy of Sciences, Phonon Scientific Industrial Association (Uzbekistan), [and] SPIE Russia Chapter.
- Text
- Bellingham, Wash. : SPIE, [1997], ©1997.
- 1997-1997
- 1 Item
Item details Format Call Number Item Location Text TP873.5.D5 L37 1997g Off-site Interconnect and contact metallization for ULSI : proceedings of the international symposium / editors, G.S. Mathad, H.S. Rathore, Y. Arita ; [sponsored by] Dielectric Science and Technology, Electronics, and Electrodeposition Divisions.
- Text
- Pennington, N.J. : Electrochemical Society, [2000], ©2000.
- 2000-2000
- 1 Item
Item details Format Call Number Item Location Text TK7874.76 .S97 1999g Off-site Plasma techniques for film deposition / Mitsuharu Konuma.
- Text
- Harrow, U.K. : Alpha Science International, [2005], ©2005.
- 2005-2005
- 1 Item
Item details Format Call Number Item Location Text TK7871.15.F5 K58 2005g Off-site Characterization of plasma-enhanced CVD processes : symposium held Novermber 27-28, 1989, Boston, Massachusetts, U.S.A. / editors, Gerald Lucovsky, Dale E. Ibbotson, Dennis W. Hess.
- Text
- Pittsburgh, Pa. : Materials Research Society, [1990], ©1990.
- 1990-1990
- 1 Item
Item details Format Call Number Item Location Text TS695.15 .C47 1990 Off-site Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.
- Text
- 1992
- 1 Item
Item details Format Call Number Item Location Text TK7836.N37 1992 Off-site Rapid thermal and laser processing : 24-25 September 1992, San Jose, California / Dim-Lee Kwong, Heinrich G. Müller, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
- Text
- Bellingham, Wash. : Society of Photo-optical Instrumentation Engineers, ©1993.
- 1993
- 1 Item
Item details Format Call Number Item Location Text TK7871.85 .R365 1993 Off-site
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